Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator

Prasad, A. , Charmet, J. and Seshia, A. A. (2016) Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator. Sensors and Actuators A: Physical, 238, pp. 207-214. (doi:10.1016/j.sna.2015.12.013)

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Abstract

A piezoelectric-on-silicon micromachined square plate resonator for the simultaneous excitation of three bulk acoustic wave modes lying within a frequency span of 2.84–3.2 MHz is reported. Three resonant modes are electrically interrogated in this frequency span, with two bulk acoustic wave mode types (Square-extensional and Lamé) well-established for this system while the third is a higher frequency mode which has not been addressed before via capacitive or piezoelectric actuation schemes. This mode was found to have a high quality factor, similar temperature co-efficient of frequency and a comparable thin-film mass sensitivity as compared to the other modes. An electrode/transducer configuration to enable selective actuation and/or suppression of the actuated in-plane modes is also reported.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Prasad, Dr Abhinav
Authors: Prasad, A., Charmet, J., and Seshia, A. A.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Sensors and Actuators A: Physical
Publisher:Elsevier
ISSN:0924-4247
ISSN (Online):1873-3069
Published Online:12 December 2015

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