Prasad, A. , Charmet, J. and Seshia, A. A. (2016) Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator. Sensors and Actuators A: Physical, 238, pp. 207-214. (doi: 10.1016/j.sna.2015.12.013)
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Abstract
A piezoelectric-on-silicon micromachined square plate resonator for the simultaneous excitation of three bulk acoustic wave modes lying within a frequency span of 2.84–3.2 MHz is reported. Three resonant modes are electrically interrogated in this frequency span, with two bulk acoustic wave mode types (Square-extensional and Lamé) well-established for this system while the third is a higher frequency mode which has not been addressed before via capacitive or piezoelectric actuation schemes. This mode was found to have a high quality factor, similar temperature co-efficient of frequency and a comparable thin-film mass sensitivity as compared to the other modes. An electrode/transducer configuration to enable selective actuation and/or suppression of the actuated in-plane modes is also reported.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Prasad, Dr Abhinav |
| Authors: | Prasad, A., Charmet, J., and Seshia, A. A. |
| College/School: | College of Science and Engineering > School of Physics and Astronomy |
| Journal Name: | Sensors and Actuators A: Physical |
| Publisher: | Elsevier |
| ISSN: | 0924-4247 |
| ISSN (Online): | 1873-3069 |
| Published Online: | 12 December 2015 |
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