Hemakumara, D., Li, X. , Floros, K., Cho, S., Guinney, I., Humphreys, C., Thayne, I. G., O'Mahony, A., Knoops, H. and Moran, D. (2019) Improved Performance of GaN Metal-Oxide-Semiconductor Capacitors byPplasma ALD of AlN Interlayer. AVS 19th International Conference on Atomic Layer Deposition (ALD 2019) / 6th International Atomic Layer Etching Workshop (ALE 2019), Washington, USA, 21-24 July 2019.
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Abstract
No abstract available.
Item Type: | Conference or Workshop Item |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Li, Dr Xu and Moran, Professor David and Floros, Mr Konstantinos and Hemakumara, Miss Dilini |
Authors: | Hemakumara, D., Li, X., Floros, K., Cho, S., Guinney, I., Humphreys, C., Thayne, I. G., O'Mahony, A., Knoops, H., and Moran, D. |
College/School: | College of Science and Engineering > School of Engineering College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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