Umatova, Z., Zhang, Y., Rajkumar, R., Dobson, P. S. and Weaver, J.M.R. (2019) Quantification of atomic force microscopy tip and sample thermal contact. Review of Scientific Instruments, 90(9), 095003. (doi: 10.1063/1.5097862)
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197149.pdf - Accepted Version 3MB |
Abstract
A thermal conduction measurement device was fabricated, consisting of a silicon dioxide membrane with integrated thermal sensors (Pt resistance heater/thermometer and Pt–Au thermocouples) using MEMS technology. Heat transfer between the heated device and a number of unused atomic force microscope and scanning thermal microscope probes was measured. Changes in thermal conduction related to changes in the tip shape resulting from initial contact were observed. The sensors were fabricated by electron beam lithography and lift-off followed by local subtractive processing of a Pt–Au multilayer to form Pt heater–resistance thermometer elements and Pt–Au thermocouples. Thermal isolation from the silicon substrate was provided by dry release of the supporting 50 nm thick SiO2 membrane using an isotropic SF6 inductively coupled plasma etch. The high thermal isolation of the sample combined with the sensitivity of the temperature sensors used allowed the detection of thermal conduction between the tip and the sample with high precision. The measured temperature range of the Pt resistor was 293–643 K. The measured thermal resistance of the membrane was 3 × 105 K/W in air and 1.44 × 106 K/W in vacuum. The tip contact resistance was measured with a noise level of 0.3g0 T at room temperature, where g0 is the thermal resistance quantum.
| Item Type: | Articles |
|---|---|
| Additional Information: | The authors would like to acknowledge the support of the Bolashak International Scholarship of the President of the Republic of Kazakhstan and the staff of the James Watt Nanofabrication Centre |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Umatova, Zarina and Weaver, Professor Jonathan and Dobson, Dr Phil |
| Authors: | Umatova, Z., Zhang, Y., Rajkumar, R., Dobson, P. S., and Weaver, J.M.R. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Review of Scientific Instruments |
| Publisher: | AIP Publishing |
| ISSN: | 0034-6748 |
| ISSN (Online): | 1089-7623 |
| Published Online: | 13 September 2019 |
| Copyright Holders: | Copyright © 2019 The Authors |
| First Published: | First published in Review of Scientific Instruments 90(9): 095003 |
| Publisher Policy: | Reproduced in accordance with the publisher copyright policy |
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