Quantification of atomic force microscopy tip and sample thermal contact

Umatova, Z., Zhang, Y., Rajkumar, R., Dobson, P. S. and Weaver, J.M.R. (2019) Quantification of atomic force microscopy tip and sample thermal contact. Review of Scientific Instruments, 90(9), 095003. (doi:10.1063/1.5097862)

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Abstract

A thermal conduction measurement device was fabricated, consisting of a silicon dioxide membrane with integrated thermal sensors (Pt resistance heater/thermometer and Pt–Au thermocouples) using MEMS technology. Heat transfer between the heated device and a number of unused atomic force microscope and scanning thermal microscope probes was measured. Changes in thermal conduction related to changes in the tip shape resulting from initial contact were observed. The sensors were fabricated by electron beam lithography and lift-off followed by local subtractive processing of a Pt–Au multilayer to form Pt heater–resistance thermometer elements and Pt–Au thermocouples. Thermal isolation from the silicon substrate was provided by dry release of the supporting 50 nm thick SiO2 membrane using an isotropic SF6 inductively coupled plasma etch. The high thermal isolation of the sample combined with the sensitivity of the temperature sensors used allowed the detection of thermal conduction between the tip and the sample with high precision. The measured temperature range of the Pt resistor was 293–643 K. The measured thermal resistance of the membrane was 3 × 105 K/W in air and 1.44 × 106 K/W in vacuum. The tip contact resistance was measured with a noise level of 0.3g0 T at room temperature, where g0 is the thermal resistance quantum.

Item Type:Articles
Additional Information:The authors would like to acknowledge the support of the Bolashak International Scholarship of the President of the Republic of Kazakhstan and the staff of the James Watt Nanofabrication Centre
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Umatova, Zarina and Weaver, Professor Jonathan and Dobson, Dr Phil
Authors: Umatova, Z., Zhang, Y., Rajkumar, R., Dobson, P. S., and Weaver, J.M.R.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Review of Scientific Instruments
Publisher:AIP Publishing
ISSN:0034-6748
ISSN (Online):1089-7623
Published Online:13 September 2019
Copyright Holders:Copyright © 2019 The Authors
First Published:First published in Review of Scientific Instruments 90(9): 095003
Publisher Policy:Reproduced in accordance with the publisher copyright policy

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
166525Scanning thermal conduction microscopy with dual cantilever resistive probe.Jonathan WeaverEngineering and Physical Sciences Research Council (EPSRC)EP/J010774/1ENG - Electronics & Nanoscale Engineering
169117QUANTIHEATPhil DobsonEuropean Commission (EC)604668ENG - Electronics & Nanoscale Engineering