Spectrum imaging of high-k dielectric stacks

MacKenzie, M., Craven, A.J., Mccomb, D.W., Hamilton, D.A. and McFadzean, S. (2004) Spectrum imaging of high-k dielectric stacks. In: Institute of Physics Electron Microscopy and Analysis Group Conference, Oxford, UK, 3 -5 Sep 2003, pp. 299-302.

Abstract

Electron energy loss spectroscopy combined with spectrum imaging gives a powerful technique that can be used to examine the structural, chemical and electronic properties of materials on a sub-nanometre scale. We have used this technique to examine high-k dielectric devices. ELNES from experimental standards have been utilised in the interpretation of the data.

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Craven, Professor Alan and McFadzean, Dr Sam
• Authors: MacKenzie, M., Craven, A.J., Mccomb, D.W., Hamilton, D.A., and McFadzean, S.
• Subjects: Q Science > QC Physics
• College/School: College of Science and Engineering > School of Physics and Astronomy
• ISSN: 0750309679

Project Code	Award No	Project Name	Principal Investigator	Funder's Name	Funder Ref	Lead Dept
35067	1	Chemistry, structure and bonding in high-k gate oxide stacks	Alan Craven	Engineering & Physical Sciences Research Council (EPSRC)	GR/S44280/01	Physics and Astronomy