Understanding gate oxide materials: ELNES of Hf and Zr compounds

MacKenzie, M., Craven, A.J. and Mccomb, D.W. (2004) Understanding gate oxide materials: ELNES of Hf and Zr compounds. In: Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference, University of Oxford, 3 - 5 September 2003, pp. 79-82.

Abstract

The local coordination environment of the silicates and oxides of Hf and Zr have been investigated using both experimental ELNES data and theoretical modelling of the near-edge structures

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: MacKenzie, Dr Maureen and Craven, Professor Alan
• Authors: MacKenzie, M., Craven, A.J., and Mccomb, D.W.
• Subjects: Q Science > QC Physics; Q Science > QD Chemistry
• College/School: College of Science and Engineering > School of Physics and Astronomy
• ISSN: 0750309679