Samanta, S. , Banerji, P. and Ganguly, P. (2017) Design and Fabrication of SU-8 Polymer Based Photonic Crystal Waveguide. In: Frontiers in Optics 2017, Washington, D.C., USA, 18-21 Sep 2017, ISBN 9781943580330 (doi: 10.1364/FIO.2017.JW3A.70)
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Abstract
We make use of optical lithography along with focused ion beam milling to fabricate our designed photonic crystal waveguide; milling depth of 220nm is obtained with an ion dose of 10K, rms roughness being 33.1nm.
| Item Type: | Conference Proceedings |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Samanta, Dr Swagata |
| Authors: | Samanta, S., Banerji, P., and Ganguly, P. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| ISBN: | 9781943580330 |
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