Samanta, S. , Banerji, P. and Ganguly, P. (2017) Focused ion beam fabrication of SU-8 waveguide structures on oxidized silicon. MRS Advances, 2(18), pp. 981-986. (doi: 10.1557/adv.2017.89)
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Abstract
This work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon substrate using ‘Focused ion beam (FIB) lithography’. From our experimentation it seems that FIB method is practically not suitable for fabricating long SU-8 waveguide structures, rather it is more suitable for nanoscale modification of already fabricated waveguides, such as, to fabricate photonic crystal structures.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Samanta, Dr Swagata |
| Authors: | Samanta, S., Banerji, P., and Ganguly, P. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | MRS Advances |
| Publisher: | Cambridge University Press |
| ISSN: | 2059-8521 |
| ISSN (Online): | 2059-8521 |
| Published Online: | 23 January 2017 |
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