Development of micro-ring resonator-based optical bandpass filter using SU8 polymer and optical lithography

Samanta, S. , Dey, P. K., Banerji, P. and Ganguly, P. (2018) Development of micro-ring resonator-based optical bandpass filter using SU8 polymer and optical lithography. Optical Materials, 77, pp. 122-126. (doi: 10.1016/j.optmat.2018.01.024)

Abstract

Laterally-coupled SU-8 ridge waveguide-based micro-ring resonator was designed, fabricated and characterized for optical filtering applications. Fabrication was done by optical lithography using a patterned chrome mask of SU-8 ridge waveguide and micro-ring resonator structures, which was replicated onto a plasma enhanced chemical vapour deposited (PECVD) silicon-dioxide layer on a silicon wafer. Optical characterization showed that the fabricated micro-ring resonator had a free spectral range (FSR) of ∼16 nm for a ring radius of 15 μm in TE polarization. A simple semiconductor laser diode and a monochromator were used for the characterization of the device. The measured through port and drop port light output for different wavelengths indicate that the device can be used as an optical filter around 1565 nm centre wavelength, with a 3 dB bandwidth of 5.3 nm and an extinction ratio of ∼10.5 dB.

• Item Type: Articles
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Samanta, Dr Swagata
• Authors: Samanta, S., Dey, P. K., Banerji, P., and Ganguly, P.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
• Journal Name: Optical Materials
• Publisher: Elsevier
• ISSN: 0925-3467
• ISSN (Online): 1873-1252
• Published Online: 09 March 2018