Novel Electroabsorption Modulator Design Based on Coplanar Waveguide Configuration

Al-Moathin, A., Hou, L. and Marsh, J. H. (2019) Novel Electroabsorption Modulator Design Based on Coplanar Waveguide Configuration. In: 12th UK/Europe-China Workshop on Millimetre-Waves and Terahertz Technologies (UCMMT) 2019, London, UK, 20-22 Aug 2019, ISBN 9781728129938 (doi: 10.1109/UCMMT47867.2019.9008337)

192784.pdf - Accepted Version



We present a new design approach for electroabsorption modulators based on integrating a microwave element monolithically with the photonic element. A new method is reported for planarizing and patterning a low-permittivity film using a hydrogen silsesquioxane spin-on coating with electron beam exposure; after 5 coating steps, the layer thickness was 6 μm. We demonstrate the design by fabricating a coplanar waveguide with a 50 Ω characteristic impedance at the input port, at operating frequencies up to 67 GHz.

Item Type:Conference Proceedings
Additional Information:This work is supported by the Engineering and Physical Sciences Research Council, UK (grant EP/L015323/1).
Glasgow Author(s) Enlighten ID:Hou, Dr Lianping and Marsh, Professor John and Al-Moathin, Mr Ali
Authors: Al-Moathin, A., Hou, L., and Marsh, J. H.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Published Online:27 February 2020
Copyright Holders:Copyright © 2019 IEEE
First Published:First published in 2019 12th UK-Europe-China Workshop on Millimeter Waves and Terahertz Technologies (UCMMT)
Publisher Policy:Reproduced in accordance with the publisher copyright policy

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