Gierak, J. et al. (2005) Exploration of the ultimate patterning potential achievable with high resolution focused ion beams. Applied Physics A: Materials Science and Processing, 80(1), pp. 187-194. (doi: 10.1007/s00339-004-2551-z)
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Publisher's URL: http://dx.doi.org/10.1007/s00339-004-2551-z
Abstract
Controlled and reproducible fabrication of nanostructured materials will be one of the main industrial challenges in the next few years. We have recently proposed exploitation of the nano-structuring potential of a high resolution Focused Ion Beam Tool, to overcome basic limitations of current nano- fabrication techniques. The aim of this article is to present some new routes for material patterning, which benefit from ion-induced local property modifications or damage. In the experiments we describe hereafter an ultra-sharp pencil of 30 keV gallium ions is used to tailor the characteristics of several materials at a scale of a few nanometres. The experimental results are then compared to simulations. First, we simulate the control of collisional defects generated in a thin magnetic layer under FIB irradiation. The results explain the stable magnetic structures we have obtained experimentally. This was achieved with a low surface ion dose (10(12) to 10(14) ions/cm(2)). In addition we have explored the promising direction of "Bottom-up" or "self-organization" processes using a FIB instrument. We have defined artificial surface defects. These defects created by the impact of an 8-nm FWHM probe were used to pin the diffusion and to organize nanometre-sized gold clusters on a graphite surface.
Item Type: | Articles |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Chapman, Professor John |
Authors: | Gierak, J., Mailly, D., Hawkes, P., Jede, R., Bruchhaus, L., Bardotti, L., Prevel, B., Melinon, P., Perez, A., Hyndman, R., Jamet, J.P., Ferre, J., Mougin, A., Chappert, C., Mathet, V., Warin, P., and Chapman, J.N. |
Subjects: | Q Science > QC Physics |
College/School: | College of Science and Engineering > School of Physics and Astronomy |
Journal Name: | Applied Physics A: Materials Science and Processing |
Journal Abbr.: | Appl. Phys. A |
ISSN: | 0947-8396 |
ISSN (Online): | 1432-0630 |
Published Online: | 27 February 2004 |
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