Touch sensor based on flexible AlN piezocapacitor coupled with MOSFET

Gupta, S., Yogeswaran, N., Giacomozzi, F., Lorenzelli, L. and Dahiya, R. (2019) Touch sensor based on flexible AlN piezocapacitor coupled with MOSFET. IEEE Sensors Journal, (doi:10.1109/JSEN.2019.2928797) (Early Online Publication)

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Abstract

This paper presents tactile sensor devices based on flexible aluminium nitride (AlN) piezocapacitor coupled with metal oxide semiconductor field effect transistor (MOSFET). The AlN exhibits piezoelectric behaviour without the typical requirement of high voltage for poling and this makes it an ideal candidate for sensor where transducer layer is integrated with MOSFET. The AlN film used here was deposited on a polyimide subsrate by room temperature RF sputtering to obtain flexible piezocapacitor. The film properties such as orientation, roughness, elemental composition and thickness were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), energy-dispersive X-ray spectroscopy (EDX) and scanning electron microscope (SEM) respectively. The tactile sensor developed by connecting the flexible AlN piezocapacitor in an extended gate configuration exhibited a sensitivity of 2.64 N-1 for a force range 0.5-3.5N. The developed sensor demonstrates a promising route towards the development of a complete CMOS compatible process for development of tactile sensors.

Item Type:Articles
Status:Early Online Publication
Refereed:Yes
Glasgow Author(s) Enlighten ID:Dahiya, Professor Ravinder and Yogeswaran, Mr Nivasan and Gupta, Mr Shoubhik
Authors: Gupta, S., Yogeswaran, N., Giacomozzi, F., Lorenzelli, L., and Dahiya, R.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Sensors Journal
Publisher:IEEE
ISSN:1530-437X
ISSN (Online):1558-1748
Published Online:15 July 2019
Copyright Holders:Copyright © 2019 IEEE
First Published:First published in IEEE Sensors Journal 2019
Publisher Policy:Reproduced under a Creative Commons license

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
682141CONTESTRavinder DahiyaEuropean Commission (EC)317488ENG - ENGINEERING ELECTRONICS & NANO ENG
663861Engineering Fellowships for Growth: Printed Tactile SKINRavinder DahiyaEngineering and Physical Sciences Research Council (EPSRC)EP/M002527/1ENG - ENGINEERING ELECTRONICS & NANO ENG