Novel Hydrogen Silsesquioxane Planarization for Electronic-Photonic Integrated Circuit Applications

Al-Moathin, A., Hou, L. and Marsh, J.H. (2019) Novel Hydrogen Silsesquioxane Planarization for Electronic-Photonic Integrated Circuit Applications. Semiconductor and Integrated Optics Conference, Cardiff, Wales, 16-18 Apr 2019. (Accepted for Publication)

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Abstract

No abstract available.

Item Type:Conference or Workshop Item
Status:Accepted for Publication
Refereed:Yes
Glasgow Author(s) Enlighten ID:Hou, Dr Lianping and Marsh, Professor John and Al-Moathin, Mr Ali
Authors: Al-Moathin, A., Hou, L., and Marsh, J.H.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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