Enlighten
Research publications by members of the University of Glasgow
home > services > Enlighten

Modelling the dielectrophoresis effect on the transport of neutral molecules in processing plasmas

Wade, N.S., Diver, D.A., McDonald, D.C., and Millar, A.P. (2000) Modelling the dielectrophoresis effect on the transport of neutral molecules in processing plasmas. Physics Letters A, 275 (5-6). 447 -451. ISSN 0375-9601 (doi:10.1016/S0375-9601(00)00610-1)

Full text not currently available from Enlighten.

Abstract

This article addresses the dynamical behaviour of sputtered neutrals in the strong electric fields arising in industrial plasmas. Such particles are displaced from the substrate surface by the impacting plasma ions, and clearly must be present in the sheath region, directly above the substrate. It is argued here that the strong electric field gradient at the mouth of trench features extracts the neutrals from the vicinity of the substrate, contributing to the efficient exhausting of the unwanted material.

Item Type:Article
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Millar, Dr Alexander and Diver, Dr Declan
Authors: Wade, N.S., Diver, D.A., McDonald, D.C., and Millar, A.P.
Subjects:Q Science > QC Physics
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Physics Letters A
Publisher:Elsevier BV
ISSN:0375-9601
ISSN (Online):1873-2429
Published Online:30 November 2000

University Staff: Request a correction | Enlighten Editors: Update this record