Low Loss Germanium-on-Silicon Waveguides for Integrated Mid-Infrared Photonics

Millar, R. W., Gallacher, K., Griskeviciute, U., Baldassarre, L., Sorel, M., Ortolani, M. and Paul, D. J. (2019) Low Loss Germanium-on-Silicon Waveguides for Integrated Mid-Infrared Photonics. In: SPIE OPTO 2019, San Francisco, CA, USA, 02-07 Feb 2019, 109230S. (doi:10.1117/12.2510009)

[img]
Preview
Text
181591.pdf - Published Version

2MB

Abstract

Low loss Ge-on-Si waveguides are demonstrated in the 8 – 14 μm atmospheric transmission window, a technology that will enable detection and sensing of unique molecular vibrations. Such a low cost platform would have applications in key markets such as pollution monitoring, explosives detection and point of care diagnostics. Rib-waveguides are fabricated using electron beam lithography and dry etching. The waveguides propagation losses are characterized using the Fabry-Perot technique, and are found to be below 5 dB/cm across the measurement range of 7.5 to 11 μm wavelength, reaching as low as ~ 1 dB/cm. The contribution to the losses are analyzed using the experimentally measured Si substrate losses, and the calculated scattering losses from an analytical model. The results verify the feasibility of the Ge-on-Si platform for integrated mid-infrared photonics and sensing.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Griskeviciute, Ms Ugne and Gallacher, Dr Kevin and Paul, Professor Douglas and Millar, Mr Ross and Sorel, Professor Marc
Authors: Millar, R. W., Gallacher, K., Griskeviciute, U., Baldassarre, L., Sorel, M., Ortolani, M., and Paul, D. J.
College/School:College of Science and Engineering > School of Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
ISSN:0277-786X
Copyright Holders:Copyright © 2019 SPIE
First Published:First published in Proceedings of SPIE 10923: 109230S
Publisher Policy:Reproduced in accordance with the publisher copyright policy

University Staff: Request a correction | Enlighten Editors: Update this record