Liftout of high-quality thin sections of a perovskite oxide thin film using a xenon plasma focused ion beam microscope

MacLaren, I. , Nord, M., Jiao, C. and Yücelen, E. (2019) Liftout of high-quality thin sections of a perovskite oxide thin film using a xenon plasma focused ion beam microscope. Microscopy and Microanalysis, 25(1), pp. 115-118. (doi:10.1017/S1431927618016239) (PMID:30696493)

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Abstract

It is shown that a xenon plasma focused ion beam (FIB) microscope is an excellent tool for high-quality preparation of functional oxide thin films for atomic resolution electron microscopy. Samples may be prepared rapidly, at least as fast as those prepared using conventional gallium FIB. Moreover, the surface quality after 2 kV final polishing with the Xe beam is exceptional with only about 3 nm of amorphized surface present. The sample quality was of a suitably high quality to allow atomic resolution high-angle annular dark field imaging and integrated differential phase contrast without any further preparation, and the resulting images were good enough for quantitative evaluation of atomic positions to reveal the oxygen octahedral tilt pattern. This suggests that such xenon plasma FIB instruments may find widespread application in transmission electron microscope and scanning transmission electron microscope specimen preparation.

Item Type:Articles
Keywords:Aberration corrected stem, focused ion beam, liftout preparation, perovskite oxides, thin films.
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Nord, Dr Magnus and MacLaren, Dr Ian
Authors: MacLaren, I., Nord, M., Jiao, C., and Yücelen, E.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Microscopy and Microanalysis
Publisher:Cambridge University Press
ISSN:1431-9276
ISSN (Online):1435-8115
Published Online:30 January 2019
Copyright Holders:Copyright © 2019 Microscopy Society of America
First Published:First published in Microscopy and Microanalysis 25(1):115-118
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
722511A Focused Ion Beam Microscopy Facility for Advanced Materials AnalysisIan MaclarenEngineering and Physical Sciences Research Council (EPSRC)EP/P001483/1S&E P&A - PHYSICS & ASTRONOMY
655181Fast Pixel Detectors: a paradigm shift in STEM imagingIan MaclarenEngineering and Physical Sciences Research Council (EPSRC)EP/M009963/1S&E P&A - PHYSICS & ASTRONOMY