Analysis on image features for a standard edge by using polarization indirect microscopic system

Wang, W., De La Rue, R. M. , Yadav, N.P., Shen, Z., Cao, Y., Liu, J., Liu, X. and Xu, B. (2019) Analysis on image features for a standard edge by using polarization indirect microscopic system. Optik, 178, pp. 363-371. (doi:10.1016/j.ijleo.2018.10.013)

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Abstract

In order to estimate the image quality of the polarization (parametric) indirect microscopic imaging (PIMI) system, an edge method based on edge spread-function (ESF) extraction was adopted to estimate the point spread-function (PSF) for PIMI imaging. A standard edge was selected as the imaging object for the ESF extraction. The edge consists of a finite area silicon nitride (SiNx) film deposited on a wafer section of gallium nitride (GaN), which has been demarcated using an atomic force microscope (AFM). In comparisons of the PSF with that of a conventional microscope (CM), the PIMI system has higher sensitivity and intensity contrast for the same spatial resolution. This result indicates that the PIMI method should be more useful for industrial SiNx/GaN measurement situations.

Item Type:Articles
Additional Information:The authors wish to acknowledge the financial supported by 111 Project, Research Fund for International Young Scientists Grant (No. 61750110520) and Jiangsu Postdoc Research Fund Grant (1601001B).
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:De La Rue, Professor Richard
Authors: Wang, W., De La Rue, R. M., Yadav, N.P., Shen, Z., Cao, Y., Liu, J., Liu, X., and Xu, B.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Optik
Publisher:Elsevier
ISSN:0030-4026
ISSN (Online):1618-1336
Published Online:03 October 2018

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