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application/pdfIEEE2018 IEEE International Interconnect Technology Conference (IITC);2018; ; ; Challenges and Progress on Carbon Nanotube Integration for BEOL InterconnectsB. UhligA. DhavamaniN. NagyK. LilienthalR. LiskeR. RamosJ. DijonH. OkunoD. KalitaJ. LeeV. GeorgievA. AsenovS. AmorosoL. WangF. KoenemannB. GotsmannG. GoncalvesB. ChenJ. LiangR. R. PandeyR. ChenA. Todri-Sanial
2018 IEEE International Interconnect Technology Conference (IITC)16 June 2018 18
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