Li, X. , Fu, Y.-C. and Thayne, I.G. (2017) A Process Development on Inductively Coupled Plasma Reactive Ion Etching in Cl2/BCl3 Chemistry for Fabricating GaN-based Vertical Nanowires. 43rd International Conference on Micro and Nanoengineering (MNE 2017), Braga, Portugal, 18-22 Sept 2017.
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Abstract
No abstract available.
Item Type: | Conference or Workshop Item |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Fu, Mr Yen-Chun and Li, Dr Xu and Thayne, Prof Iain |
Authors: | Li, X., Fu, Y.-C., and Thayne, I.G. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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