High accuracy transfer printing of single-mode membrane silicon photonic devices

McPhillimy, J., Guilhabert, B., Klitis, C. , Dawson, M. D., Sorel, M. and Strain, M. J. (2018) High accuracy transfer printing of single-mode membrane silicon photonic devices. Optics Express, 26(13), pp. 16679-16688. (doi:10.1364/OE.26.016679)

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Abstract

A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) μ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Klitis, Mr Charalambos and Sorel, Professor Marc and Strain, Dr Michael
Authors: McPhillimy, J., Guilhabert, B., Klitis, C., Dawson, M. D., Sorel, M., and Strain, M. J.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Optics Express
Publisher:Optical Society of America
ISSN:1094-4087
ISSN (Online):1094-4087
Published Online:14 June 2018
Copyright Holders:Copyright © 2018 Optical Society of America
First Published:First published in Optics Express 26(13): 16679-16688
Publisher Policy:Reproduced under a Creative Commons License

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
743661Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic ChipsMarc SorelEngineering and Physical Sciences Research Council (EPSRC)EP/P013570/1ENG - ENGINEERING ELECTRONICS & NANO ENG
635911CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsingMarc SorelEngineering and Physical Sciences Research Council (EPSRC)EP/L021129/1ENG - ENGINEERING ELECTRONICS & NANO ENG
671091ROAM - Revolutionising Optical Fibre Transmission and Networking Using the Orbital Angular Momentum of LightMarc SorelEuropean Commission (EC)645361ENG - ENGINEERING ELECTRONICS & NANO ENG