Morozov, D. , Doyle, S. M., Banerjee, A., Brien, T. L.R., Hemakumara, D., Thayne, I. G. , Wood, K. and Hadfield, R. H. (2018) Design and characterisation of titanium nitride sub-arrays of kinetic inductance detectors for passive terahertz imaging. Journal of Low Temperature Physics, 193(3-4), pp. 196-202. (doi: 10.1007/s10909-018-2023-z)
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Abstract
We report on the investigation of titanium nitride (TiN) thin films deposited via atomic layer deposition (ALD) for microwave kinetic inductance detectors (MKID). Using our in-house ALD process, we have grown a sequence of TiN thin films (thickness 15, 30, 60 nm). The films have been characterised in terms of superconducting transition temperature Tc , sheet resistance Rs and microstructure. We have fabricated test resonator structures and characterised them at a temperature of 300 mK. At 350 GHz, we report an optical noise equivalent power NEPopt≈2.3×10−15 W/√Hz , which is promising for passive terahertz imaging applications.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Banerjee, Mr Archan and Hadfield, Professor Robert and Morozov, Dr Dmitry and Hemakumara, Miss Dilini |
| Authors: | Morozov, D., Doyle, S. M., Banerjee, A., Brien, T. L.R., Hemakumara, D., Thayne, I. G., Wood, K., and Hadfield, R. H. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Journal of Low Temperature Physics |
| Publisher: | Springer |
| ISSN: | 0022-2291 |
| ISSN (Online): | 1573-7357 |
| Published Online: | 18 July 2018 |
| Copyright Holders: | Copyright © 2018 The Authors |
| First Published: | First published in Journal of Low Temperature Physics 193(3-4):196-202 |
| Publisher Policy: | Reproduced under a Creative Commons License |
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