Design and characterisation of titanium nitride sub-arrays of kinetic inductance detectors for passive terahertz imaging

Morozov, D. , Doyle, S. M., Banerjee, A., Brien, T. L.R., Hemakumara, D., Thayne, I. G., Wood, K. and Hadfield, R. H. (2018) Design and characterisation of titanium nitride sub-arrays of kinetic inductance detectors for passive terahertz imaging. Journal of Low Temperature Physics, 193(3-4), pp. 196-202. (doi:10.1007/s10909-018-2023-z)

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Abstract

We report on the investigation of titanium nitride (TiN) thin films deposited via atomic layer deposition (ALD) for microwave kinetic inductance detectors (MKID). Using our in-house ALD process, we have grown a sequence of TiN thin films (thickness 15, 30, 60 nm). The films have been characterised in terms of superconducting transition temperature Tc , sheet resistance Rs and microstructure. We have fabricated test resonator structures and characterised them at a temperature of 300 mK. At 350 GHz, we report an optical noise equivalent power NEPopt≈2.3×10−15 W/√Hz , which is promising for passive terahertz imaging applications.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Banerjee, Mr Archan and Hadfield, Professor Robert and Thayne, Professor Iain and Morozov, Dr Dmitry and Hemakumara, Miss Dilini
Authors: Morozov, D., Doyle, S. M., Banerjee, A., Brien, T. L.R., Hemakumara, D., Thayne, I. G., Wood, K., and Hadfield, R. H.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Journal of Low Temperature Physics
Publisher:Springer
ISSN:0022-2291
ISSN (Online):1573-7357
Published Online:18 July 2018
Copyright Holders:Copyright © 2018 The Authors
First Published:First published in Journal of Low Temperature Physics 193(3-4):196-202
Publisher Policy:Reproduced under a Creative Commons License

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
6672319UK Quantum Technology Hub in Enhanced Quantum ImagingMiles PadgettEngineering and Physical Sciences Research Council (EPSRC)EP/M01326X/1S&E P&A - PHYSICS & ASTRONOMY
673311IRIS - Infrared imaging and sensing: the single photonRobert HadfieldEuropean Research Council (ERC)648604ENG - ENGINEERING ELECTRONICS & NANO ENG