Rotzinger, H., Skacel, S.T., Pfirrmann, M., Voss, J.N., Münzberg, J., Probst, S., Bushev, P., Weides, M.P. , Ustinov, A.V. and Mooij, J.E. (2016) Aluminium-oxide wires for superconducting high kinetic inductance circuits. Superconductor Science and Technology, 30(2), 025002. (doi: 10.1088/0953-2048/30/2/025002)
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155819.pdf - Accepted Version 1MB |
Abstract
We investigate thin films of conducting aluminium-oxide, also known as granular aluminium, as a material for superconducting high quality, high kinetic inductance circuits. The films are deposited by an optimised reactive DC magnetron sputter process and characterised using microwave measurement techniques at milli-Kelvin temperatures. We show that, by precise control of the reactive sputter conditions, a high room temperature sheet resistance and therefore high kinetic inductance at low temperatures can be obtained. For a coplanar waveguide resonator with 1.5 kΩ sheet resistance and a kinetic inductance fraction close to unity, we measure a quality factor in the order of 700 000 at 20 mK. Furthermore, we observe a sheet resistance reduction by gentle heat treatment in air. This behaviour is exploited to study the kinetic inductance change using the microwave response of a coplanar wave guide resonator. We find the correlation between the kinetic inductance and the sheet resistance to be in good agreement with theoretical expectations.
Item Type: | Articles |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Weides, Professor Martin |
Authors: | Rotzinger, H., Skacel, S.T., Pfirrmann, M., Voss, J.N., Münzberg, J., Probst, S., Bushev, P., Weides, M.P., Ustinov, A.V., and Mooij, J.E. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Journal Name: | Superconductor Science and Technology |
Publisher: | IOP Publishing |
ISSN: | 0953-2048 |
ISSN (Online): | 1361-6668 |
Copyright Holders: | Copyright © 2016 IOP Publishing Ltd |
First Published: | First published in Superconductor Science and Technology 30(2): 025002 |
Publisher Policy: | Reproduced in accordance with the publisher copyright policy |
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