On-chip magnetoresistive detection of resonance in microcantilevers

Patil, S.B. , Guedes, A., Freitas, P. P., Cardoso, S., Chu, V. and Conde, J. P. (2009) On-chip magnetoresistive detection of resonance in microcantilevers. Applied Physics Letters, 95(2), 023502. (doi: 10.1063/1.3174912)

Abstract

Magnetoresistive spin-valve sensors were used to provide on-chip detection of the mechanical resonance of a thin silicon microelectromechanical systems cantilever. The spin-valve sensor was placed underneath the free end of the cantilever. A CoCrPt thin-film permanent magnet was placed on top of the amorphous silicon/Al cantilever. The cantilever was electrostatically actuated and its deflection creates a change in the magnetic field that can be sensed by the spin-valve sensor. The resonance frequency of the structure in the megahertz range is detected by the measurement of the spin-valve sensor output. Minimum deflection detection limit is determined to be 0.06 Å/Hz1/2.

• Item Type: Articles
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Patil, Dr Samadhan
• Authors: Patil, S.B., Guedes, A., Freitas, P. P., Cardoso, S., Chu, V., and Conde, J. P.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
• Journal Name: Applied Physics Letters
• Publisher: AIP Publishing
• ISSN: 0003-6951
• ISSN (Online): 1077-3118
• Published Online: 14 July 2009