On-chip magnetoresistive detection of resonance in microcantilevers

Patil, S.B. , Guedes, A., Freitas, P. P., Cardoso, S., Chu, V. and Conde, J. P. (2009) On-chip magnetoresistive detection of resonance in microcantilevers. Applied Physics Letters, 95(2), 023502. (doi:10.1063/1.3174912)

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Abstract

Magnetoresistive spin-valve sensors were used to provide on-chip detection of the mechanical resonance of a thin silicon microelectromechanical systems cantilever. The spin-valve sensor was placed underneath the free end of the cantilever. A CoCrPt thin-film permanent magnet was placed on top of the amorphous silicon/Al cantilever. The cantilever was electrostatically actuated and its deflection creates a change in the magnetic field that can be sensed by the spin-valve sensor. The resonance frequency of the structure in the megahertz range is detected by the measurement of the spin-valve sensor output. Minimum deflection detection limit is determined to be 0.06 Å/Hz1/2.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Patil, Dr Samadhan
Authors: Patil, S.B., Guedes, A., Freitas, P. P., Cardoso, S., Chu, V., and Conde, J. P.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Applied Physics Letters
Publisher:AIP Publishing
ISSN:0003-6951
ISSN (Online):1077-3118
Published Online:14 July 2009

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