Mass sensing using an amorphous silicon MEMS resonator

Patil, S.B. , Chu, V. and Conde, J.P. (2009) Mass sensing using an amorphous silicon MEMS resonator. Procedia Chemistry, 1(1), pp. 1063-1066. (doi:10.1016/j.proche.2009.07.265)

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Abstract

Bilayer micro-bridge resonators of amorphous silicon and titanium were fabricated on a glass substrate at 100°C by surface micromachining using an aluminum sacrificial layer. Au square patterns with sub-micrometer dimensions were patterned on top of the microresonators. These Au squares allowed specific immobilization of thiolated single strand DNA probe oligonucleotides. The frequency response of the electrostatically-actuated resonators was measured optically. The mass loading effect of the Au squares and of the immobilized ssDNA probes were determined by the shift in the resonance frequency of the micro-bridge resonators.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Patil, Dr Samadhan
Authors: Patil, S.B., Chu, V., and Conde, J.P.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Procedia Chemistry
Publisher:Elsevier
ISSN:1876-6196
ISSN (Online):1876-6196
Published Online:04 September 2009
Copyright Holders:Copyright © 2009 The Authors
First Published:First published in Procedia Chemistry 1(1):1063-1066
Publisher Policy:Reproduced under a Creative Commons License

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