Escorcia Carranza, I. , Grant, J. , Gough, J. and Cumming, D. R.S. (2017) CMOS Terahertz Metamaterial Based 64 × 64 Bolometric Detector Arrays. In: 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Cancun, Mexico, 27 Aug - 01 Sep 2017, ISBN 9781509060504 (doi: 10.1109/IRMMW-THz.2017.8067138)
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Abstract
We present two terahertz detectors composed of microbolometer sensors (vanadium oxide and silicon pn diode) and metamaterial absorbers monolithically integrated into a complementary metal oxide semiconductor (CMOS) process. The metamaterial absorbers were created using the metal-dielectric-metal layers of a commercial CMOS technology resulting in low-cost terahertz detectors. The scalability of this technology was used to form a 64 × 64 pixel terahertz focal plane array.
Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Cumming, Professor David and Gough, Mr John and Grant, Dr James and Escorcia Carranza, Dr Ivonne |
Authors: | Escorcia Carranza, I., Grant, J., Gough, J., and Cumming, D. R.S. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Research Group: | Microsystem Technology Group |
ISSN: | 2162-2035 |
ISBN: | 9781509060504 |
Published Online: | 16 October 2017 |
Copyright Holders: | Copyright © 2017 IEEE |
First Published: | First published in 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) |
Publisher Policy: | Reproduced in accordance with the publisher copyright policy |
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