First tests of a novel radiation hard CMOS sensor process for Depleted Monolithic Active Pixel Sensors

Pernegger, H. et al. (2017) First tests of a novel radiation hard CMOS sensor process for Depleted Monolithic Active Pixel Sensors. Journal of Instrumentation, 12(6), P06008. (doi: 10.1088/1748-0221/12/06/P06008)

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Abstract

The upgrade of the ATLAS [1] tracking detector for the High-Luminosity Large Hadron Collider (LHC) at CERN requires novel radiation hard silicon sensor technologies. Significant effort has been put into the development of monolithic CMOS sensors but it has been a challenge to combine a low capacitance of the sensing node with full depletion of the sensitive layer. Low capacitance brings low analog power. Depletion of the sensitive layer causes the signal charge to be collected by drift sufficiently fast to separate hits from consecutive bunch crossings (25 ns at the LHC) and to avoid losing the charge by trapping. This paper focuses on the characterization of charge collection properties and detection efficiency of prototype sensors originally designed in the framework of the ALICE Inner Tracking System (ITS) upgrade [2]. The prototypes are fabricated both in the standard TowerJazz 180nm CMOS imager process [3] and in an innovative modification of this process developed in collaboration with the foundry, aimed to fully deplete the sensitive epitaxial layer and enhance the tolerance to non-ionizing energy loss. Sensors fabricated in standard and modified process variants were characterized using radioactive sources, focused X-ray beam and test beams before and after irradiation. Contrary to sensors manufactured in the standard process, sensors from the modified process remain fully functional even after a dose of 1015neq/cm2, which is the the expected NIEL radiation fluence for the outer pixel layers in the future ATLAS Inner Tracker (ITk) [4].

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Maneuski, Dr Dima and Bates, Dr Richard and Buttar, Professor Craig
Authors: Pernegger, H., Bates, R., Buttar, C., Dalla, M., van Hoorne, J.W., Kugathasan, T., Maneuski, D., Musa, L., Riedler, P., Riegel, C., Sbarra, C., Schaefer, D., Schioppa, E.J., and Snoeys, W.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Journal of Instrumentation
Publisher:IOP Publishing
ISSN:1748-0221
ISSN (Online):1748-0221
Published Online:07 June 2017
Copyright Holders:Copyright © 2017 CERN
First Published:First published in Journal of Instrumentation 12(6): P06008
Publisher Policy:Reproduced under a Creative Commons license

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
684001AIDA 2020: Advanced European Infrastructures for Detectors at AcceleratorsPaul SolerEuropean Commission (EC)654168S&E P&A - PHYSICS & ASTRONOMY
600011Experimental Particle PhysicsAnthony DoyleScience & Technology Facilities Council (STFC)ST/K001205/1P&A - PHYSICS & ASTRONOMY