Thickness-dependent thermal properties of amorphous insulating thin films measured by photoreflectance microscopy

Al Mohtar, A., Tessier, G., Ritasalo, R., Matvejeff, M., Stormonth-Darling, J. , Dobson, P. , Chapuis, P.O., Gomès, S. and Roger, J.P. (2017) Thickness-dependent thermal properties of amorphous insulating thin films measured by photoreflectance microscopy. Thin Solid Films, 642, pp. 157-162. (doi:10.1016/j.tsf.2017.09.037)

[img]
Preview
Text
148521.pdf - Accepted Version

1MB

Abstract

In this work, we report on the measurement of the thermal conductivity of thin insulating films of SiO2 obtained by thermal oxidation, and Al2O3 grown by atomic layer deposition (ALD), both on Si wafers. We used photoreflectance microscopy to determine the thermal properties of the films as a function of thickness in the 2 nm to 1000 nm range. The effective thermal conductivity of the Al2O3 layer is shown to decrease with thickness down to 70% for the thinnest layers. The data were analyzed upon considering that the change in the effective thermal conductivity corresponds to an intrinsic thermal conductivity associated to an additional interfacial thermal resistance. The intrinsic conductivity and interfacial thermal resistance of SiO2 were found to be equal to 0.95 W/m·K and 5.1 × 10− 9 m2K/W respectively; those of Al2O3 were found to be 1.56 W/m·K and 4.3 × 10− 9 m2K/W.

Item Type:Articles
Additional Information:This work was funded by the European Union Seventh Framework Program FP7-NMP-2013-LARGE-7 under grant agreement number 8604668 “Quantiheat”
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Stormonth-Darling, Mr John and Dobson, Dr Phil
Authors: Al Mohtar, A., Tessier, G., Ritasalo, R., Matvejeff, M., Stormonth-Darling, J., Dobson, P., Chapuis, P.O., Gomès, S., and Roger, J.P.
College/School:College of Science and Engineering > School of Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Thin Solid Films
Publisher:Elsevier
ISSN:0040-6090
ISSN (Online):1879-2731
Published Online:19 September 2017
Copyright Holders:Copyright © 2017 Elsevier B.V.
First Published:First published in Thin Solid Films 642:157-162
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

University Staff: Request a correction | Enlighten Editors: Update this record

Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
622881QUANTIHEATPhil DobsonEuropean Commission (EC)604668ENG - ENGINEERING ELECTRONICS & NANO ENG