T-gate fabrication using a ZEP520A/UVIII bilayer

Thoms, S. (2001) T-gate fabrication using a ZEP520A/UVIII bilayer. Microelectronic Engineering, 57-58, pp. 939-943.

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Item Type:Articles
Glasgow Author(s) Enlighten ID:Thoms, Dr Stephen
Authors: Thoms, S.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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