Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond

Lister, K., Casey, B., Dobson, P., Thoms, S., Macintyre, D., Wilkinson, C. and Weaver, J. (2004) Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond. Microelectronic Engineering, 73-4, pp. 319-322. (doi:10.1016/j.mee.2004.02.060)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Thoms, Dr Stephen and Macintyre, Dr Douglas and Weaver, Professor Jonathan and Dobson, Dr Phil
Authors: Lister, K., Casey, B., Dobson, P., Thoms, S., Macintyre, D., Wilkinson, C., and Weaver, J.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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