High electron mobility transistors fabricated by nanoimprint lithography

Chen, Y., Macintyre, D., Boyd, E., Moran, D., Thayne, I. and Thoms, S. (2003) High electron mobility transistors fabricated by nanoimprint lithography. Microelectronic Engineering, 67-8, pp. 189-195. (doi:10.1016/S0167-9317(03)00183-7)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Thayne, Professor Iain and Thoms, Dr Stephen and Moran, Dr David and Macintyre, Dr Douglas
Authors: Chen, Y., Macintyre, D., Boyd, E., Moran, D., Thayne, I., and Thoms, S.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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