Monte Carlo study of mobility in Si devices with HfO2-based oxides

Ferrari, G., Watling, J., Roy, S., Barker, J., Zeitzoff, P., Bersuker, G. and Asenov, A. (2006) Monte Carlo study of mobility in Si devices with HfO2-based oxides. Materials Science in Semiconductor Processing, 9, pp. 995-999. (doi: 10.1016/j.mssp.2006.10.035)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Barker, Professor John and Watling, Dr Jeremy and Roy, Professor Scott and Asenov, Professor Asen
Authors: Ferrari, G., Watling, J., Roy, S., Barker, J., Zeitzoff, P., Bersuker, G., and Asenov, A.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Materials Science in Semiconductor Processing

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