Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates

Elgaid, K., McCloy, D. and Thayne, I. (2003) Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates. Microelectronic Engineering, 67-8, pp. 417-421. (doi:10.1016/S0167-9317(03)00188-6)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Thayne, Professor Iain and Elgaid, Dr Khaled
Authors: Elgaid, K., McCloy, D., and Thayne, I.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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