Elgaid, K., McCloy, D. and Thayne, I. (2003) Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates. Microelectronic Engineering, 67-8, pp. 417-421. (doi: 10.1016/S0167-9317(03)00188-6)
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| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Elgaid, Dr Khaled |
| Authors: | Elgaid, K., McCloy, D., and Thayne, I. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Microelectronic Engineering |
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