Thoms, S. and Macintyre, D. (2007) Tilt-corrected stitching for electron beam lithography. Microelectronic Engineering, 84, pp. 793-796. (doi: 10.1016/j.mee.2007.01.127)
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| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thoms, Dr Stephen and Macintyre, Dr Douglas |
| Authors: | Thoms, S., and Macintyre, D. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Microelectronic Engineering |
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