Multilevel silicon diffractive optics for terahertz waves

Walsby, E.D., Wang, S., Xu, J., Yuan, T., Blaikie, R., Durbin, S.M., Zhang, X.C. and Cumming, D.R.S. (2002) Multilevel silicon diffractive optics for terahertz waves. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 20(6), pp. 2780-2783. (doi:10.1116/1.1518021)

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Publisher's URL: http://dx.doi.org/10.1116/1.1518021

Abstract

A multilevel microfabrication process has been developed to produce silicon Fresnel lenses for terahertz waves. A repeated binary fabrication process was used to create lenses with up to eight levels in complexity and these lenses have been compared to both less complex structures and refractive optic lenses. The microfabrication required deep reactive ion etching and multilevel resist processing using SU8 photoresist. At the design frequency of 1 THz an eight-level lens showed significant improvement in intensity at the focus and had much reduced energy lost into sidelobes compared with refractive lenses.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cumming, Professor David
Authors: Walsby, E.D., Wang, S., Xu, J., Yuan, T., Blaikie, R., Durbin, S.M., Zhang, X.C., and Cumming, D.R.S.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ISSN:1071-1023

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