Chen, Y., Macintyre, D. and Thoms, S. (2003) A non-destructive method for the removal of residual resist in imprinted patterns. Microelectronic Engineering, 67-8, pp. 245-251. (doi: 10.1016/S0167-9317(03)00184-9)
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| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thoms, Dr Stephen and Macintyre, Dr Douglas |
| Authors: | Chen, Y., Macintyre, D., and Thoms, S. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Microelectronic Engineering |
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