Macintyre, D.S., Young, I., Glidle, A., Cao, X., Weaver, J.M.R. and Thoms, S. (2006) High resolution e-beam lithography using a thin titanium layer to promote resist adhesion. Microelectronic Engineering, 83(4-9), pp. 1128-1131. (doi: 10.1016/j.mee.2006.01.103)
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Publisher's URL: http://dx.doi.org/10.1016/j.mee.2006.01.103
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thoms, Dr Stephen and Macintyre, Dr Douglas and Weaver, Professor Jonathan and Glidle, Dr Andrew |
| Authors: | Macintyre, D.S., Young, I., Glidle, A., Cao, X., Weaver, J.M.R., and Thoms, S. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering College of Science and Engineering > School of Engineering > Biomedical Engineering |
| Journal Name: | Microelectronic Engineering |
| ISSN: | 0167-9317 |
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