Compact semiconductor tapers for deep-to-shallow etch transitions

Strain, M.J. and Sorel, M. (2007) Compact semiconductor tapers for deep-to-shallow etch transitions. IEEE Photonics Technology Letters, 19, pp. 1544-1546. (doi:10.1109/LPT.2007.903886)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Sorel, Professor Marc and Strain, Dr Michael
Authors: Strain, M.J., and Sorel, M.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Photonics Technology Letters
ISSN:1041-1135

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