Nanometre scale overlay and stitch metrology using an optical microscope

MacIntyre, D. and Thoms, S. (2006) Nanometre scale overlay and stitch metrology using an optical microscope. Microelectronic Engineering, 83, pp. 1051-1054. (doi:10.1016/j.mee.2006.01.022)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Thoms, Dr Stephen and Macintyre, Dr Douglas
Authors: MacIntyre, D., and Thoms, S.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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