Encapsulation of a liquid-sensing microchip using SU-8 photoresist

Hammond, P. and Cumming, D. (2004) Encapsulation of a liquid-sensing microchip using SU-8 photoresist. Microelectronic Engineering, 73-4, pp. 893-897. (doi:10.1016/j.mee.2004.03.071)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Hammond, Dr Paul
Authors: Hammond, P., and Cumming, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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