A single-step process for making nanofluidic channels using electron beam lithography

Pearson, J. and Cumming, D. (2005) A single-step process for making nanofluidic channels using electron beam lithography. Microelectronic Engineering, 78-79, pp. 343-348. (doi:10.1016/j.mee.2004.12.045)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cumming, Professor David
Authors: Pearson, J., and Cumming, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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