Drysdale, T., Mills, G., Ferguson, S., Blaikie, R. and Cumming, D. (2004) Terahertz tuneable filters made by self-releasing deep dry etch process. Microelectronic Engineering, 73-4, pp. 441-446. (doi: 10.1016/j.mee.2004.03.014)
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Item Type: | Articles |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Cumming, Professor David and Drysdale, Dr Timothy |
Authors: | Drysdale, T., Mills, G., Ferguson, S., Blaikie, R., and Cumming, D. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Journal Name: | Microelectronic Engineering |
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