Terahertz tuneable filters made by self-releasing deep dry etch process

Drysdale, T., Mills, G., Ferguson, S., Blaikie, R. and Cumming, D. (2004) Terahertz tuneable filters made by self-releasing deep dry etch process. Microelectronic Engineering, 73-4, pp. 441-446. (doi:10.1016/j.mee.2004.03.014)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Drysdale, Dr Timothy
Authors: Drysdale, T., Mills, G., Ferguson, S., Blaikie, R., and Cumming, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering

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