Terahertz metamaterial absorbers implemented in CMOS technology for imaging applications: scaling to large format focal plane arrays

Escorcia Carranza, I. , Grant, J. P. , Gough, J. and Cumming, D. (2017) Terahertz metamaterial absorbers implemented in CMOS technology for imaging applications: scaling to large format focal plane arrays. IEEE Journal of Selected Topics in Quantum Electronics, 23(4), 4700508. (doi:10.1109/JSTQE.2016.2630307)

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Abstract

We present the design and fabrication of terahertz (THz) metamaterial (MM) absorbers and their monolithic integration into a commercial CMOS technology along with its respective readout electronics to produce a low-cost, uncooled and high resolution THz camera. We first describe the work done on single band and broadband MM absorbers on custom substrates then progress with a description of the integration of such resonators into a six metal layer 180 nm CMOS process and its coupling with two types of microbolometer sensors: vanadium oxide (VOx) and silicon (Si) pn diode. Additionally, we demonstrate the integration of the THz sensors with readout electronics to form a monolithic THz focal plane array (FPA). Reflection images of a metallic object hidden in a manila envelope are recorded using both the VOx and Si pn diode detectors, demonstrating the suitability of the technology for stand-off detection of concealed objects. Lastly, we present the current work towards scaling this technology into a 64 x 64 FPA.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Escorcia Carranza, Dr Ivonne and Gough, Mr John and Grant, Dr James
Authors: Escorcia Carranza, I., Grant, J. P., Gough, J., and Cumming, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:IEEE Journal of Selected Topics in Quantum Electronics
Publisher:Institute of Electrical and Electronics Engineers
ISSN:1077-260X
ISSN (Online):1558-4542
Published Online:18 November 2016
Copyright Holders:Copyright © 2016 The Authors
First Published:First published in IEEE Journal of Selected Topics in Quantum Electronics 23(4): 4700508
Publisher Policy:Reproduced under a Creative Commons License

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
588332Triple wavelength superspectral camera focal-plane array (SUPERCAMERA)David CummingEngineering & Physical Sciences Research Council (EPSRC)EP/J018678/1ENG - ENGINEERING ELECTRONICS & NANO ENG
552421Monolithic Resonant TeraHertz DetectorsDavid CummingEngineering & Physical Sciences Research Council (EPSRC)EP/I017461/1ENG - ENGINEERING ELECTRONICS & NANO ENG