Millar, R. , Gallacher, K. , Frigerio, J., Ballabio, A., Bashir, A., MacLaren, I. , Isella, G. and Paul, D. J. (2016) Engineering large in-plane tensile strains in Ge microdisks, microrings and racetrack optical cavities. ECS Transactions, 75(8), pp. 633-640. (doi: 10.1149/07508.0633ecst)
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Abstract
Highly strained Ge micro-cavities are demonstrated, with biaxial equivalent tensile strains > 2 % at the top surface, demonstrating photoluminescence up to the detector cut-off of 2.5 μm wavelength. Ge on Si micro-disk, rings, and racetrack structures are investigated, which have been undercut by wet etching techniques. The anisotropy of the wet etch in the Si leads to the realization of novel, partially suspended structures. The strain distributions in the different cavity structures are discussed and compared with regard to the in-plane uniformity, peak strain level, and effect of the strain distribution on the Ge band-structure.
Item Type: | Articles |
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Additional Information: | PRiME 2016/230th ECS Meeting, Honolulu, HI, USA, 2-7 Oct 2016. |
Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Paul, Professor Douglas and Millar, Dr Ross and MacLaren, Dr Ian and Bashir, Ms Aneeqa and Gallacher, Dr Kevin |
Authors: | Millar, R., Gallacher, K., Frigerio, J., Ballabio, A., Bashir, A., MacLaren, I., Isella, G., and Paul, D. J. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering College of Science and Engineering > School of Physics and Astronomy |
Journal Name: | ECS Transactions |
Publisher: | The Electrochemical Society |
ISSN: | 1938-6737 |
ISSN (Online): | 1938-6737 |
Copyright Holders: | Copyright © 2016 The Eletrochemical Society |
First Published: | First published in ECS Transactions 75(8):633-640 |
Publisher Policy: | Reproduced in accordance with the copyright policy of the publisher |
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