Engineering large in-plane tensile strains in Ge microdisks, microrings and racetrack optical cavities

Millar, R., Gallacher, K., Frigerio, J., Ballabio, A., Bashir, A., MacLaren, I. , Isella, G. and Paul, D. J. (2016) Engineering large in-plane tensile strains in Ge microdisks, microrings and racetrack optical cavities. ECS Transactions, 75(8), pp. 633-640. (doi:10.1149/07508.0633ecst)

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Abstract

Highly strained Ge micro-cavities are demonstrated, with biaxial equivalent tensile strains > 2 % at the top surface, demonstrating photoluminescence up to the detector cut-off of 2.5 μm wavelength. Ge on Si micro-disk, rings, and racetrack structures are investigated, which have been undercut by wet etching techniques. The anisotropy of the wet etch in the Si leads to the realization of novel, partially suspended structures. The strain distributions in the different cavity structures are discussed and compared with regard to the in-plane uniformity, peak strain level, and effect of the strain distribution on the Ge band-structure.

Item Type:Articles
Additional Information:PRiME 2016/230th ECS Meeting, Honolulu, HI, USA, 2-7 Oct 2016.
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Millar, Mr Ross and Bashir, Ms Aneeqa and MacLaren, Dr Ian and Paul, Professor Douglas and Gallacher, Dr Kevin
Authors: Millar, R., Gallacher, K., Frigerio, J., Ballabio, A., Bashir, A., MacLaren, I., Isella, G., and Paul, D. J.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Physics and Astronomy
Journal Name:ECS Transactions
Publisher:The Electrochemical Society
ISSN:1938-6737
ISSN (Online):1938-6737
Copyright Holders:Copyright © 2016 The Eletrochemical Society
First Published:First published in ECS Transactions 75(8):633-640
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
694301Engineering Quantum Technology Systems on a Silicon PlatformDouglas PaulEngineering & Physical Sciences Research Council (EPSRC)EP/N003225/1ENG - ENGINEERING ELECTRONICS & NANO ENG
634451GEMINIDouglas PaulEuropean Commission (EC)613055ENG - ENGINEERING ELECTRONICS & NANO ENG