Low-Leakage Current and Damage-Free SiNx Deposition at 30oC By Inductively Coupled Plasma with Neutral Beams by Neutralization Grid Plate

Zhou, H., Li, X. and Fu, Y. (2015) Low-Leakage Current and Damage-Free SiNx Deposition at 30oC By Inductively Coupled Plasma with Neutral Beams by Neutralization Grid Plate. In: 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2015), San Diego, CA, USA, 26-29 May 2015,

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Abstract

No abstract available.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Li, Dr Xu and Zhou, Dr Haiping
Authors: Zhou, H., Li, X., and Fu, Y.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
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