Zhou, H., Li, X. and Fu, Y. (2015) Low-Leakage Current and Damage-Free SiNx Deposition at 30oC By Inductively Coupled Plasma with Neutral Beams by Neutralization Grid Plate. In: 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2015), San Diego, CA, USA, 26-29 May 2015,
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Abstract
No abstract available.
Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Li, Dr Xu and Zhou, Dr Haiping |
Authors: | Zhou, H., Li, X., and Fu, Y. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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