Li, X. , Floros, K., Hemakumara, D., Moran, D. and Thayne, I. G. (2015) Realisation of Low Annealing Temperature and Low Resistance Ohmic Contacts forAlGaN/GaN-Based Power Devices Via SiH4 Inductively Coupled Plasma Treatment. In: UK Semiconductor Conference, Sheffield, UK, 1-2 July 2015,
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Abstract
No abstract available.
Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Li, Dr Xu and Thayne, Prof Iain and Moran, Professor David and Hemakumara, Miss Dilini |
Authors: | Li, X., Floros, K., Hemakumara, D., Moran, D., and Thayne, I. G. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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