Role of the oxygen partial pressure on the properties of undoped tin oxide films deposited at low temperature

Parreira, P. , Valente, J. , Lavareda, G., Nunes de Carvalho, C., Ramos, A.R., Alves, E., Brogueira, P. and Amaral, A. (2008) Role of the oxygen partial pressure on the properties of undoped tin oxide films deposited at low temperature. Physica Status Solidi A: Applications and Materials Science, 205(8), pp. 1957-1960. (doi:10.1002/pssa.200778930)

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Abstract

The aim of this work is to determine the influence of the oxygen partial pressure on the optical, electrical and structural properties of transparent and conductive undoped tin oxide (SnOx) thin films. These films were deposited by radio frequency plasma enhanced reactive thermal evaporation (rf-PERTE) of tin in the presence of oxygen at low substrate temperatures (140 °C). Electrical properties obtained in such thin films show dependence with the oxygen partial pressure. When pressure ranges from 1.5 × 10–2 to 6.0 × 10–2 Pa, resistivity varies between 3.3 × 10–1 Ω cm and 2.6 × 10–1 Ω cm, respectively. The lowest resistivity value obtained was 2.0 × 10–2 Ω cm for films deposited at an oxygen partial pressure of about 3.0 × 10–2 Pa. All samples present a reasonably good visible transmittance value between 75–85%. Topography of the samples obtained by AFM show a relative uniform and flat surface with mean square roughness (RMS) of the order of 1.1 nm. RBS measurements show that the highest conductivity is obtained for SnOx films with an O/Sn ratio of about 2.51.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Valente, Dr Joao and Parreira, Dr Pedro Miguel
Authors: Parreira, P., Valente, J., Lavareda, G., Nunes de Carvalho, C., Ramos, A.R., Alves, E., Brogueira, P., and Amaral, A.
College/School:College of Science and Engineering > School of Physics and Astronomy
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Physica Status Solidi A: Applications and Materials Science
Publisher:Wiley
ISSN:1862-6300
ISSN (Online):1862-6319
Published Online:17 July 2008

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