Parreira, P. , Lavareda, G., Valente, J. , Nunes, F.T., Amaral, A. and Nunes de Carvalho, C. (2010) Undoped InOx films deposited by radio frequency plasma enhanced reactive thermal evaporation at room temperature: importance of substrate. Journal of Nanoscience and Nanotechnology, 10(4), pp. 2701-2704. (doi:10.1166/jnn.2010.1431) (PMID:20355487)
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Abstract
Conductive and transparent undoped thin films of indium oxide (InOx ), 120 nm average thick, were deposited by radio frequency plasma enhanced reactive thermal evaporation (rf-PERTE) of indium in the presence of oxygen at room temperature. Several substrates were used in order to study their influence on the main properties of these films: alkali free (AF) glass, fused silica, crystalline silicon and polyethylene terephthalate (PET). Surface morphology of the InOx films as a function of the substrates was observed by SEM and showed that the undoped InOx films obtained are nanostructured. For the c-Si substrate, InOx films with increased grain size are obtained, induced by the crystalline substrate. Films deposited on fused silica and AF glass substrates show a nano-grainy surface with similar surface morphologies. The InOx films deposited on AF glass show the highest values of both: electrical conductivity of about 1100 ( cm)−1 and visible transmittance of 85%. The substrate has a greater influence on the surface morphology of the films when a polymer (PET) is used. InOx films deposited on PET show a decrease in the electrical conductivity (90 ( cm)−1) and a slight decrease in the average visible transmittance (78%).
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Valente, Dr Joao and Parreira, Dr Pedro Miguel |
| Authors: | Parreira, P., Lavareda, G., Valente, J., Nunes, F.T., Amaral, A., and Nunes de Carvalho, C. |
| College/School: | College of Science and Engineering > School of Physics and Astronomy College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Journal of Nanoscience and Nanotechnology |
| Publisher: | American Scientific Publishers |
| ISSN: | 1533-4880 |
| ISSN (Online): | 1533-4899 |
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