A New Generation of X-Ray Spectrometry UHV instruments at the SR Facilities BESSY II, ELETTRA and SOLEIL

Lubeck, J. et al. (2016) A New Generation of X-Ray Spectrometry UHV instruments at the SR Facilities BESSY II, ELETTRA and SOLEIL. In: 12th International Conference On Synchrotron Radiation Instrumentation: SRI2015, New York, NY, USA, 6-10 July 2015, 030011. ISBN 9780735413986 (doi: 10.1063/1.4952834)

Abstract

A novel type of ultra-high vacuum instrument for X-ray reflectometry and spectrometry-related techniques for nanoanalytics by means of synchrotron radiation (SR) has been constructed and commissioned at BESSY II. This versa-tile instrument was developed by the PTB, Germany’s national metrology institute, and includes a 9-axis manipulator that allows for an independent alignment of the samples with respect to all degrees of freedom. In addition, it integrates a ro-tational and translational movement of several photodiodes as well as a translational movement of a beam-geometry-defining aperture system. Thus, the new instrument enables various analytical techniques based on energy dispersive X-ray detectors such as reference-free X-Ray Fluorescence (XRF) analysis, total-reflection XRF, grazing-incidence XRF, in addition to optional X-Ray Reflectometry (XRR) measurements or polarization-dependent X-ray absorption fine structure analyses (XAFS). Samples having a size of up to (100 × 100) mm2; can be analyzed with respect to their mass depo-sition, elemental, spatial or species composition. Surface contamination, nanolayer composition and thickness, depth pro-file of matrix elements or implants, nanoparticles or buried interfaces as well as molecular orientation of bonds can be accessed. Three technology transfer projects of adapted instruments have enhanced X-Ray Spectrometry (XRS) research activities within Europe at the synchrotron radiation facilities ELETTRA (IAEA) and SOLEIL (CEA/LNE-LNHB) as well as at the X-ray innovation laboratory BLiX (TU Berlin) where different laboratory sources are used. Here, smaller chamber requirements led PTB in cooperation with TU Berlin to develop a modified instrument equipped with a 7-axis manipulator: reduced freedom in the choice of experimental geometry modifications (absence of out-of-SR-plane and reference-free XRS options) has been compensated by encoder-enhanced angular accuracy for GIXRF and XRR. © 2016 Author(s)

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Kaiser, Professor Ralf
• Authors: Lubeck, J., Bogovac, M., Boyer, B., Detlefs, B., Eichert, D., Fliegauf, R., Grötzsch, D., Holfelder, I., Hönicke, P., Jark, W., Kaiser, R.B., Kanngießer, B., Karydas, A. G., Leani, J. J., Lépy, M. C., Lühl, L., Ménesguen, Y., Migliori, A., Müller, M., Pollakowski, B., Spanier, M., Sghaier, H., Ulm, G., Weser, J., and Beckhoff, B.
• College/School: College of Science and Engineering > School of Physics and Astronomy
• ISSN: 0094-243X
• ISBN: 9780735413986
• Copyright Holders: Copyright © 2016 The Authors
• First Published: First published in AIP Conference Proceedings 1741:030011
• Publisher Policy: Reproduced in accordance with the copyright policy of the publisher