GaN-based HEMTs on Low Resistivity Silicon Technology for Microwave Applications

Eblabla, A., Li, X. , Wallis, D. J., Guiney, I. and Elgaid, K. (2016) GaN-based HEMTs on Low Resistivity Silicon Technology for Microwave Applications. In: 8th Wide Bandgap Semiconductor and Components Workshop, Harwell. UK, 12-13 Sept 2016,

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Abstract

This paper investigates the effect of insertion AlN spacer between the GaN channel and buffer in a sub-micron gate (0.3 μm) AlGaN/GaN HEMTs on a low-resistivity (LR) (σ < 10 Ω.cm) silicon substrates on RF performance. Enhancement in short circuit current gain (fT) and maximum frequency of oscillation (fMAX) was observed in the HEMT with a 1 nm AlN spacer, where (fT) and (fMAX) were increased from 47 GHz to 55 GHz and 79 GHz to 121 GHz, respectively. Small-signal-modelling analysis was carried out to study this improvement in performance. We found that the AlN interlayer played a crucial role in reducing the gate-source capacitance, Cgs, by 36 % and delay, τ, by 20 % under the gate, as a result of an increase in mobility and a reduction in trap-related effects.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Li, Dr Xu and Elgaid, Dr Khaled
Authors: Eblabla, A., Li, X., Wallis, D. J., Guiney, I., and Elgaid, K.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Copyright Holders:Copyright © 2016 The Authors
Publisher Policy:Reproduced with the permission of the authors.
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