MacKenzie, M., Craven, A.J., McComb, D.W. and De Gendt, S. (2006) Interfacial reactions in a HfO2/TiN/poly-Si gate stack. Applied Physics Letters, 88, (doi: 10.1063/1.2201891)
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Item Type: | Articles |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | McComb, Dr David and Craven, Professor Alan |
Authors: | MacKenzie, M., Craven, A.J., McComb, D.W., and De Gendt, S. |
College/School: | College of Science and Engineering > School of Chemistry College of Science and Engineering > School of Physics and Astronomy |
Journal Name: | Applied Physics Letters |
ISSN: | 0003-6951 |
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