Fabrication of Ultra-Thin Silicon based Flexible Piezoelectric Capacitive Sensor

Gupta, S., Giacomozzi, F., Heidari, H. , Lorenzelli, L. and Dahiya, R. (2016) Fabrication of Ultra-Thin Silicon based Flexible Piezoelectric Capacitive Sensor. In: EUROSENSORS 2016 Conference, Budapest, Hungary, 4-7 Sep 2016,

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This paper presents an ultra-thin silicon based tactile sensor, in a piezoelectric capacitor configuration, realized through post-processing steps. The piezoelectric capacitor composed of polyvinylidene fluoride trifluoroethylene (PVDF-TrFE), present an attractive avenue for tactile sensing as they respond to dynamic contact events (which is critical for robotic tasks), are easy to fabricate at low cost in standard microfabrication environment. The device is fabricated over bulk silicon, which is thinned down to 55 µm from original thickness of 636 µm using TMAH wet etching. The sensor is electrically tested and capacitance value is measured to be 1 nF and calculated relative permittivity is 11.3. The response of sensing device, to dynamic normal forces is measured using TIRA shaker setup and sensitivity is reported to be around 80mV/N.

Item Type:Conference Proceedings
Glasgow Author(s) Enlighten ID:Heidari, Dr Hadi and Dahiya, Professor Ravinder
Authors: Gupta, S., Giacomozzi, F., Heidari, H., Lorenzelli, L., and Dahiya, R.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
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